Electronic packaging apparatus and method

ABSTRACT

An electronic assembly includes a substrate, a device attached to the substrate, and a thermally conductive heat spreader covering the device and at least a portion of the substrate. A metal substantially fills the space between the device and the thermally conductive heat spreader. A method includes attaching at least one die to a substrate, placing a thermally conductive heat spreader over the die, and injecting a molten metal material into the space between the thermally conductive heat spreader and the die.

FIELD OF THE INVENTION

The present invention relates generally to apparatus and methods for thedissipation of thermal energy from heat-producing components. Moreparticularly, it relates to liquid metal infiltration of electronicpackages with solder thermal interface materials.

BACKGROUND OF THE INVENTION

Today's semiconductor devices, whether discrete power or logic ICs, aresmaller, run faster, do more and generate more heat. Some desktopmicroprocessors dissipate power levels in the range of 50 to 100 watts.These power levels require thermal management techniques involving largecapacity heat sinks, good air flow and careful management of thermalinterface resistances. A well designed thermal management program willkeep operating temperatures within acceptable limits in order tooptimize device performance and reliability.

Semiconductor devices are kept within their operating temperature limitsby transferring junction-generated waste heat to the ambientenvironment, such as the surrounding room air. This is best accomplishedby attaching a heat sink to the semiconductor package surface, thusincreasing the heat transfer between the hot case and the cooling air. Aheat sink is selected to provide optimum thermal performance. Once thecorrect heat sink has been selected, it must be carefully joined to thesemiconductor package to ensure efficient heat transfer through thisnewly formed thermal interface.

Thermal materials have been used to join a semiconductor package and aheat sink, and to dissipate the heat from semiconductor devices, such asmicroprocessors. Thermal interface material (TIM) typically includes apolymer matrix and a thermally conductive filler. The TIM technologiesused for electronic packages encompass several classes of materials suchas epoxies, greases, gels and phase change materials.

Metal filled epoxies commonly are highly conductive materials thatthermally cure into highly crosslinked materials. However, they havesignificant integration issues with other components of the package. Forexample, many times metal filled epoxies exhibit localized phaseseparation within the material that can result in high contactresistance. Furthermore, the metal filled epoxies can also delaminate atthe interfaces.

Thermal greases are in a class of materials that offers severaladvantages compared to other classes of materials, including goodwetting and ability to conform to the interfaces, no post-dispenseprocessing, and high bulk thermal conductivity. Greases provideexcellent performance in a variety of packages; however, greases cannotbe used universally with all packages due to degradation of thermalperformance during temperature cycling. It is observed that in somepackages greases migrate out from between the interfaces under cyclicalstresses encountered during temperature cycling. This phenomenon isknown as “pump out.”

In some applications an integral heat spreader is used to spread theheat and protect the semiconductor device beneath the integral heatspreader. In some applications, air is trapped within the integral heatspreader. Air is a poor thermal conductor.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention is pointed out with particularity in the appended claims.However, a more complete understanding of the present invention may bederived by referring to the detailed description when considered inconnection with the figures, wherein like reference numbers refer tosimilar items throughout the figures and:

FIG. 1 is a cross-section view of an electronic assembly according to anembodiment of the invention.

FIG. 2 is a cross-section view of a thermally conductive heat spreaderaccording to an embodiment of the invention.

FIG. 3 is a cross-section view of an electronic assembly according toanother embodiment of the invention.

FIG. 4 is a cross-section view of an electronic assembly according toyet another embodiment of the invention.

FIG. 5 is a cross-section view of an electronic assembly duringmanufacture, according to an embodiment of the invention.

FIG. 6 is a cross-section view of an electronic assembly as molten metalis within a gate in a mold during manufacture, according to anembodiment of the invention.

FIG. 7 is a cross-section view of an electronic assembly after moltenmetal has partially filled the space between the die and the thermallyconductive heat spreader, according to an embodiment of the invention.

FIG. 8 is a cross-section view of an electronic assembly after moltenmetal has substantially filled the space between the die and thethermally conductive heat spreader, according to an embodiment of theinvention.

FIG. 9 is a cross-section view of an electronic assembly after a moldhas been removed from the electronic assembly, according to anembodiment of the invention.

FIG. 10 is a flow diagram of a method of making the electronic assembly,according to an embodiment of the invention.

FIG. 11 is a flow diagram of another method of making the electronicassembly, according to an embodiment of the invention.

FIG. 12 is a flow diagram of another method of making the electronicassembly, according to an embodiment of the invention.

The description set out herein illustrates the various embodiments ofthe invention, and such description is not intended to be construed aslimiting in any manner.

DETAILED DESCRIPTION

In the following detailed description, reference is made to theaccompanying drawings, which are not necessarily to scale, which form apart hereof, and in which is shown, by way of illustration, specificembodiments in which the apparatus and methods can be practiced. Theseembodiments are described in sufficient detail to enable those skilledin the art to practice them, and it is to be understood that theembodiments can be combined, or that other embodiments can be utilizedand that procedural changes can be made without departing from thespirit and scope of the present invention. The following detaileddescription is, therefore, not to be taken in a limiting sense, and thescope is defined by the appended claims and their equivalents. In thedrawings, like numerals describe substantially similar componentsthroughout the several views.

FIG. 1 is a cross-sectional view of an electronic assembly 100,according to an embodiment of the invention. The electronic assembly 100includes a substrate 110, a device 120 attached to the substrate 110,and a thermally conductive heat spreader 130 covering the device 120 andat least a portion of the substrate 110. A metal 150 is interposedbetween the device 120 and the thermally conductive heat spreader 130.In some embodiments, the metal 150 substantially fills the space betweenthe device 120 and the thermally conductive heat spreader 130. The metal150 has a lower melting point than the melting point of the thermallyconductive heat spreader 130. The metal 150 is a thermal interfacematerial between the device 120 and the thermally conductive heatspreader 130. The thermally conductive heat spreader 130 furtherincludes a first column 132 and a second column 134. Both the firstcolumn 132 and the second column are also substantially filled with thelower melting point metal 150. The thermally conductive heat spreader130 includes a plate 131, and four sidewalls attached to the plate 131.The four sidewalls substantially surround the device 120 attached to thesubstrate 110. Two of the sidewalls 135, 136 are shown in FIG. 1. Insome embodiments, the thermally conductive heat spreader 130 iscup-shaped. The device 120 includes at least one semiconductor die 121.

The semiconductor die 121 includes an integrated circuit. Thesemiconductor die 121 further includes solder bumps 122 formed on amajor surface of the semiconductor die 121. The solder bumps 122 areformed according to the controlled collapse chip connect (C 4) process.The solder bumps 122 are structurally secured to the substrate 110 usinga solder bump reflow process. The solder bumps 122 are also electricallyconnected to the integrated circuit of the semiconductor die 121, sothat signals can be provided through the solder bumps 122 to and fromthe integrated circuit of the semiconductor die 121.

The electronic assembly 100 further includes an underfill material 102located between the substrate 110 and the device 120. The underfillmaterial 102 prevents metal 150 from entering the volume between thedevice 120 and the substrate 110. In some embodiments, the metal 150substantially filling the space between the device and the thermallyconductive heat spreader 130 is a solder material. In furtherembodiments, the metal substantially filling the space between thedevice 120 and the thermally conductive heat spreader 130 includesindium.

FIG. 2 is a cross-section view of a thermally conductive heat spreader130 according to an embodiment of the invention. The thermallyconductive heat spreader 130 includes a thin nickel layer 232 plated ona primary heat spreading structure 230. A layer of gold 234 is plated ona portion of the nickel layer 232. The layer of gold 234 providesenhanced adhesion of the metal 150 to the surfaces including the layerof gold 234. If the metal 150 used is a solder, the gold layer 234provides enhanced solderability to the surfaces of the thermallyconductive heat spreader 130 that have the layer of gold 234. The heatspreader includes a plate 131 and four side walls. Three sidewalls 135,136 and 235 are shown in FIG. 2.

FIG. 3 is a cross-section view of an electronic assembly 300 accordingto another embodiment of the invention. The electronic assembly 300 issimilar to the electronic assembly 100 (shown in FIG. 1). Therefore, forthe sake of brevity, the discussion of FIG. 3 will discuss thedifferences between the electronic assembly 300 and the electronicassembly 100. The electronic assembly 300 includes a substrate 110, adevice 320 attached to the substrate 110, and a thermally conductiveheat spreader 330 covering the device 320 and at least a portion of thesubstrate 330. A metal 350 is interposed between the device 320 and thethermally conductive heat spreader 330. In the embodiment shown, themetal 350 substantially fills the space between the device 320 and thethermally conductive heat spreader 330. The metal 350 is a thermalinterface material between the device 320 and the thermally conductiveheat spreader 130. The device 320 includes a first semiconductor die322, a second semiconductor die 324, and a third semiconductor die 326.The first semiconductor die 322 is attached to the substrate 110. Anunderfill material 302 is placed between the first semiconductor die 322and the substrate 110. The second semiconductor die 324 is attached tothe first semiconductor die 322. An underfill material 312 is placedbetween the first semiconductor die 322 and the second semiconductor die324. The third semiconductor die 326 is attached to the secondsemiconductor die 324. An underfill material 314 is placed between thesecond semiconductor die 324 and the third semiconductor die 326. Athermally conductive heat spreader 330 is placed over the device 320. Aheat sink 360 is attached to the thermally conductive heat spreader 330.The heat sink 360 is attached to the thermally conductive heat spreader330 so as to provide a thermally conductive pathway between the heatsink 360 and the thermally conductive heat spreader 330. The heat sink360 includes a plurality of fins 362 for dissipating heat to theatmosphere near the assembly. The arrows in FIG. 3 represent heat flowor thermal conductivity from the semiconductor dies 322, 324, 326,through the metal thermal interface material 350, to the thermallyconductive heat spreader 330 and to the heat sink 360.

FIG. 4 is a cross-section view of an electronic assembly 400 accordingto another embodiment of the invention. The electronic assembly 400 issimilar to the electronic assembly 100 (shown in FIG. 1). Therefore, forthe sake of brevity, the discussion of FIG. 4 will discuss thedifferences between the electronic assembly 400 and the electronicassembly 100. The electronic assembly 400 includes a semiconductor die420 as well as a first component 410 and a second component 412 that areattached to the substrate 110. The first component 410 and the secondcomponent 412 are placed under a thermally conductive heat spreader 430.A low melting point metal 450 is interposed between the thermallyconductive heat spreader 430 and the semiconductor die 420. In theembodiment shown, the metal 450 substantially fills the space betweenthe thermally conductive heat spreader 430 and the semiconductor die 420and the components 410, 412. The metal 450 is a thermal interfacematerial between the semiconductor die 420 and the thermally conductiveheat spreader 430. The metal 450 is a thermal interface material betweenthe components 410, 412 and the thermally conductive heat spreader 430.The first component 410 and the second component 412 are sealed. Thisprevents the metal 450 from contacting the contacts on the components410, 412 and causing a short in the components. A heat sink 460 isattached to the thermally conductive heat spreader 430. The heat sink460 is attached to the thermally conductive heat spreader 430 so as toprovide a thermally conductive pathway between the heat sink 460 and thethermally conductive heat spreader 430. The heat sink 460 includes aplurality of fins 462 for dissipating heat to the atmosphere near theassembly. The arrows in FIG. 4 represent heat flow or thermalconductivity from the semiconductor die 420, through the metal thermalinterface material 450, to the thermally conductive heat spreader 430and to the heat sink 460.

FIGS. 5–9 show various stages of manufacturing an electronic assembly,according to an embodiment of the invention. It should noted that onceone or more semiconductor dies have been attached to the substrate 110,the manufacturing process is substantially the same. As shown in FIGS.5–9, the electronic assembly includes only one semiconductor dieattached to the substrate 110. An electronic assembly having a pluralityof semiconductor dies could also be used as an example and themanufacturing process after attaching the semiconductor dies issubstantially the same. Additional components, such as capacitors,resistors, and other passive devices, may also be attached to thesubstrate 110 and placed under the thermally conductive heat spreader430. For all components that will be positioned beneath the thermallyconductive heat spreader 430 are electrically isolated from moltenmaterial, an underfill fill material 102 is placed between the componentand the substrate 110 to prevent molten metal from entering the spacebetween the substrate and the component. In addition, each die and eachcomponent is also further electrically isolated. Encapsulation with apolymer or other similar electrically insulative material is providedfor the components that will be exposed to molten metal in the processdiscussed below. In a stacked configuration such as shown in FIG. 3, thedie or component adjacent the substrate 110 is underfilled. Theremaining stacked dies or components are encapsulated using a polymer.The dies or components may be partially or fully encapsulated. Stackeddie packages often contain wirebonds from the substrate 110 to thestacked dies. Encapsulation of the stack prevents the liquid, molten,metal from shorting these wires. In addition, any bonding sites forattaching the wirebonds to the substrate 110 or another component arealso encapsulated.

In addition, a wetting layer to enhance solderability can also beprovided on the surfaces of the components, the substrate 130 and thethermally conductive heat spreader 430 that will contact molten metalduring infiltration or flowing of the metal as discussed below. Such awetting layer aids liquid metal infiltration and bonding on the surfaceson the inside of the package and more specifically within the spacebetween the components and the thermally conductive heat spreader. Thewetting layer can include a gold, silver, or tin coating applied to thesubstrate, encapsulation, and other surfaces within the space viaplating, sputtering, or similar method.

FIG. 5 is a cross-section view of an electronic assembly duringmanufacture, according to an embodiment of the invention. A mold 500 isplaced over a thermally conductive heat spreader 130. The thermallyconductive heat spreader 130 covers the die 121 that is attached to thesubstrate 110. The thermally conductive heat spreader 130 includes afirst gate or channel for fluid communication 532 and a second gate orchannel for fluid communication 534. The mold 500 also includes a firstgate or channel for fluid communication 512 and a second gate or channelfor fluid communication 514. When positioned properly, the gate 532substantially aligns with gate 512, and the gate 534 substantiallyaligns with gate 514. The mold 500 is preheated. The mold 500 is held inplace until the thermally conductive heat spreader 130 is heated to aselected point. Other portions of electronic assembly may also be heatedto a selected point. A source of vacuum 540 is connected to the gate 514to remove gases from the space formed between the thermally conductiveheat spreader 130 and the device 120. A vacuum is pulled prior toflowing, forcing or injecting metal into the space between the componentor components and the thermally conductive heat spreader 130. In analternative embodiment of the invention, a source of gas is connected tothe gate 514. The gas is less reactive than the atmosphere. In someinstances the gas is an inert gas. The less reactive gas is placed intothe space between the die 121, the substrate 110 and the thermallyconductive heat spreader 130 after initially pulling the vacuum. Inother words, the atmospheric gas is replaced with a less reactive gas,such as an inert gas, in this alternative embodiment, after a vacuum ispulled. Since a perfect vacuum is rarely achievable, purging the spacewith an inert gas reduces the possibility of forming oxides or othercontaminating substances in the space between the die 121, the substrate110 and the thermally conductive heat spreader 130. For example, aninitial vacuum is pulled on the cavity or space between the die 121, thesubstrate 110 and the thermally conductive heat spreader 130 manyreaches elements and removed. Subsequent flushing of the space or cavitywith an inert gas fills the cavity with non reactive element. A secondvacuum is then applied to the space or cavity. This further lessens anyamount of remaining reactive gas in the cavity. Any remaining amountsshould not be harmful. For example, the remaining gas will not cause aliquid metal to form an oxide skin during infiltration.

FIG. 6 is a cross-section view of an electronic assembly while moltenmetal 600 is within a gate 512 in a mold 500 during manufacture,according to an embodiment of the invention. It should be noted that theterm molten metal includes metal is in a liquid state as well as metalthat is in a partially solidified state. Metal in a partially solidifiedstate includes a portion that is in a solidified state. Metal in apartially solidified state tends not to shrink as much during cooling.In addition, metal in a partially solidified state has less latent heatrelease. In some embodiments, there may be applications for use ofmolten metal that is in a partially solidified state. Therefore, in thefollowing discussion, molten metal will refer both to metal in a liquidstate as well as to a metal that includes at least a portion in asolidified state.

As mentioned above, the mold 500 and other portions of the electronicassembly are heated to a selected temperature where a low melting pointmolten metal 600 will not solidify on contact with the mold or one ofthe portions of the electronic assembly. Once the selected temperatureis reached, molten metal 600 from a source of molten metal 610 is placedinto the gate 512 of the mold 500. The molten metal 600 can be any lowmelting point metal such as a solder compound. In some embodiments, themolten metal 600 includes indium. In some embodiments, the molten metalis a formulation of a solder including indium. The source of the moltenmetal 600 comes from the bottom of the source of molten metal 610 so asto reduce the number of oxides of the metal 600. The metal at the top ofthe source 610 is more likely to contain oxides of the molten metal 600.By removing molten metal from the bottom of the source of molten metal,the possibility of entrapping oxides or oxide films in the molten metalflowed into the space between the devices and the thermally conductiveheat spreader is lessened.

FIG. 7 is a cross-section view of an electronic assembly duringmanufacture after molten metal has partially filled the space betweenthe die and the thermally conductive heat spreader, according to anembodiment of the invention. In FIG. 7 the molten metal is interposedbetween the device and the thermally conductive heat spreader. Themolten metal 600 continues through gate 512 and gate 532 and enters thespace between the die 121 and the thermally conductive heat spreader130. The molten metal 600 is pressurized or pumped into the spacebetween the die 121 and the thermally conductive heat spreader 130. Themolten metal is flowed, injected, forced or similarly placed into thespace between the device and the thermally conductive heat spreader. Theobjective is to interpose molten metal between the device and thethermally conductive heat spreader. In some embodiments, the spacebetween the die 121 and the thermally conductive heat spreader 130. Asshown in FIGS. 5, 6 and 7, the molten metal also fills the gap or anygap 710 which is between the substrate 110 and the thermally conductiveheat spreader 130 is substantially filled. It should be noted that thethermally conductive heat spreader 130 may include a layer of gold 234(as shown in FIG. 2). The layer of gold improves the wettability of themolten metal to the thermally conductive heat spreader 130. The layer ofgold 234 is present where the molten metal 600 is present duringmanufacture. It should also be noted that the device 120, andspecifically the die 121, may also be treated with a metallization layerin order to facilitate wettability or bonding to the semiconductor die121. Gold plating or a similar wetting layer, can be placed on some orall of the surfaces that make contact with the molten metal in thecavity or space. Plating or a wetting layer can be placed on thesubstrate. A wetting layer, such as gold, in some embodiments, is placedone on top of a polymer for encapsulating package components within thecavity or space. In some embodiments, a wetting layer is placed oninternal package surfaces. A wetting layer could be put down by avariety of methods including plating, spluttering or similar method.

In addition, it should be noted that at the junction between thesubstrate 110 and the die 121, an underfilling 102 is preventing themolten metal from contacting individual electrical contacts associatedwith the die 121. The supply of molten metal 610 is pressurized orpumped until the entire space between the die 121 and the thermallyconductive heat spreader 130 is filled. In some instances, the gap 710between the thermally conductive heat spreader 130 and the substrate 110is also filled.

FIG. 8 is a cross sectional view of an electronic assembly duringmanufacture after molten metal 600 has been placed between the die 121and the thermally conductive heat spreader. As shown, the molten metal600 has substantially filled the space between the die 121 and thethermally conductive heat spreader, according to an embodiment of thisinvention. The molten metal 600 also enters the gap 710 and a similargap on the opposite side of the thermally conductive heat spreader 130.Once all the spaces are substantially filled with molten metal 600, themolten metal 600 enters the gate 534 in the thermally conductive heatspreader 130 and enters the gate 514 in the mold 500. A source ofpressure 810 is attached to the gate 512 and to the gate 514 of the mold500. A pressure is then applied to the molten metal 600 which is in thespaces described above. By applying a pressure, shrinkage due to coolingof the molten metal 600 is reduced and controlled. In addition, applyinga pressure from the source of pressure 810 also controls porosity in themetal 600 as it solidifies. Shrinkage and excessive porosity result inless thermal conductivity in the solidified metal. In other words,excessive porosity and shrinkage during cooling can compromise thethermal conductivity of the molten metal upon solidification. Thepressure is continuously applied to the gates 512 and 514 of the mold500 until the molten metal 600 is solidified. Then the mold 500 and thesource of pressure 810 are removed.

In an alternative embodiment, a source of pressure is applied to themolten metal 600 from the initial stage of flowing, forcing, injectingor interposing the molten metal into the space between the die 121 andthe thermally conductive heat spreader 130. Pressure is appliedcontinuously as the molten metal is flowed into the space between thedie 121 and the thermally conductive heat spreader 130 and maintainedafter the space is filled and the molten metal cools to a solid state.This alternative embodiment, further controls shrinkage and excessiveporosity. The source of pressure 810 can be any source of pressure, suchas a pressurized gas or a piston. In addition, the molten metal can bemoved in a number of different ways, including the use ofelectromagnetic forces to pump the molten metal or Lorenz forces. Thepressure may be modified at different times. For example, after thecavity or space is filled, the pressure may be increased or decreased orotherwise changed as the molten metal solidifies.

FIG. 9 is a cross sectional view of an electronic assembly 900 after themold 500 (shown in FIGS. 5–8) has been removed, according to anembodiment of the invention. FIG. 9 corresponds to FIG. 1, with the heatsink 160 removed from the thermally conductive heat spreader 130. Insome embodiments, a heat spreader may be used and in other embodiments aheat spreader may not be attached to the assembly shown in FIG. 9. Theelectronic device 900 shown in FIG. 9 includes a substrate 110 with adevice 120 attached to the substrate 110. Specifically, the device is asemiconductor die 121 having solder balls 122 which are connected tocorresponding pads on the substrate 110. The electrical connectionsbetween the die 121 and the substrate 110 are enclosed or covered withan underfill material 102. After dies attach and before flowing themolten metal, the components under the thermally conductive heatspreader can also encapsulated before flowing molten metal. Theencapsulation may be full or partial. Pads for bonding wires can also beencapsulated. The die 121 and a portion of the substrate 110 are coveredwith a thermally conductive heat spreader 130. The gaps between the die121 and the thermally conductive heat spreader 130 are filled with ametal 150. The thermally conductive heat spreader also includes a column132 and a column 134 of the metal. As shown in FIG. 9, metal 150 alsofills a gap 710 and a gap 712. It should be noted that the electronicassembly 900 shown in FIG. 9 has been flipped after the electronicassembly 900 has been removed from the mold in FIG. 8.

FIG. 10 is a flow diagram of a method 1000 of making the electronicassembly, according to an embodiment of the invention. The method 1000includes attaching a die to a substrate 1010, and isolating the die andother components 1011. Isolating includes underfilling the space betweenthe die or component and the substrate. Isolating can also includeencapsulating components, using a polymer or other electricallyisolating material. Stacked die packages often contain wirebonds fromthe substrate 110 to the stacked dies. Encapsulation of the stackprevents the liquid, molten, metal from shorting these wires. The method1000 also includes heating a mold 1012, placing a thermally conductiveheat spreader into the mold 1014, and placing the substrate into themold 1016. In some embodiments, the method also includes removingreactive elements from the space between the die and the thermallyconductive heat spreader 1017. In one embodiment, removing reactiveelements from the space between the die and the thermally conductiveheat spreader includes initially placing a vacuum on the space betweenthe die and the thermally conductive heat spreader, flushing the spacewith an inert gas and placing a second vacuum on the space. The methodfurther includes placing a pressure on the molten metal material 1018.Pressure may be placed on the molten metal during substantially theentire process of flowing the metal. Pressurization may be constant orit can be changed at certain times, such as when the metal is cooling.The method 1000 also includes flowing a molten metal material into thespace between the thermally conductive heat spreader and the die 1019.Flowing the molten metal material into the space between the thermallyconductive heat spreader and the die includes flowing a molten metalmaterial through a gate in the mold and a gate in the thermallyconductive heat spreader. The method 1000 further includes cooling themold, and thermally conductive heat spreader to solidify the moltenmetal material 1022. In some embodiments, cooling includes directionalcooling.

FIG. 11 is a flow diagram of another method 1100 of making theelectronic assembly, according to an embodiment of the invention. Themethod 1100 is very similar to the method 1000. One element is replaced.The method 1100 includes replacing a first gas and the reactive elementstherein in the space between the die and the thermally conductive heatspreader with a second inert or less reactive gas 1110. The second gasis less reactive than the first gas or the second gas is an inert gas.In some embodiments, the method includes stacking a second die onto thefirst die.

FIG. 12 is a flow diagram of another method 1200 of making theelectronic assembly, according to an embodiment of the invention. Themethod 1200 includes attaching at least one die to a substrate 1210. Insome embodiments, the method also includes underfilling the spacebetween the die and the substrate and encapsulation of all componentsthat will contact the molten metal. The method 1200 also includesplacing a thermally conductive heat spreader over the die 1212. In someembodiments, the method includes removing reactive elements from thespace between the die and the thermally conductive heat spreader 1213.Removing gas from the space between the die and the thermally conductiveheat spreader 1213 can include placing a vacuum on the space between thedie and the thermally conductive heat spreader. In some otherembodiments, a first gas in the space between the die and the thermallyconductive heat spreader is replaced with a second gas. The second gasis less reactive than the first gas or is an inert gas. The method 1200may also include placing a second vacuum or partial vacuum on the space.The method 1200 also includes interposing a molten metal between theheat spreader and die by injecting a molten metal material into thespace between the thermally conductive heat spreader and the die 1214.In some embodiments, the method includes pressurizing the molten metalmaterial 1215. In other embodiments, the pressure is maintained duringsubstantially the entire time the molten metal is injected or flowedthrough solidification of the molten metal. In some embodiments, themethod 1200 also includes attaching a second die onto the substrate. Insome embodiments, the method 1200 includes stacking a second die ontothe at least one die attached to the substrate. The method 1200 alsoincludes cooling the molten metal material after the space between theat least one die and the thermally conductive heat spreader was filledwith the molten metal material 1216. The method 1200 can also includethermally attaching a heat sink to the thermally conductive heatspreader 1220.

It is to be understood that the above description is intended to beillustrative and not restrictive. Many other embodiments will beapparent to those of skill in the art upon reviewing the abovedescription. The scope of the invention should, therefore, be determinedwith reference to the appended claims, along with the full scope ofequivalents to which such claims are entitled.

1. A method comprising: attaching a die to a substrate; heating a mold;placing a thermally conductive heat spreader into the mold; placing thesubstrate into the mold; and flowing a molten metal material intocontact with the thermally conductive heat spreader and the die tosubstantially fill a space between the thermally conductive heatspreader and the die with the metal material.
 2. The method of claim 1further comprising underfilling the space between the die and thesubstrate.
 3. The method of claim 1 further comprising encapsulating thedie.
 4. The method of claim 1 wherein flowing a molten metal materialinto contact with the thermally conductive heat spreader and the dieincludes flowing a molten metal material through a gate in the mold anda gate in the thermally conductive heat spreader.
 5. The method of claim1 further comprising cooling the mold and the thermally conductive heatspreader to solidify the molten metal material.
 6. The method of claim 1further comprising placing a pressure on the molten metal material. 7.The method of claim 6 wherein placing a pressure on the molten metalincludes maintaining a pressure substantially during flowing a moltenmaterial.
 8. The method of claim 1 further comprising removing reactivecomponents from the space between the die and the thermally conductiveheat spreader.
 9. The method of claim 8 wherein removing reactivecomponents from the space between the die and the thermally conductiveheat spreader further includes: initially drawing a vacuum on the spacebetween the die and the thermally conductive heat spreader tosubstantially remove a first gas; and purging the space between the dieand the thermally conductive heat spreader with a second gas.
 10. Themethod of claim 9 wherein the second gas is less reactive than the firstgas.
 11. The method of claim 9 further comprising drawing a secondvacuum on the space between the die and the thermally conductive heatspreader.
 12. The method of claim 9 wherein the second gas is an inertgas.
 13. The method of claim 1 further comprising adding a wetting layerto at least one of the surfaces associated with the space between thesubstrate and the thermally conductive heat spreader.
 14. The method ofclaim 1 further comprising stacking a second die onto the first die. 15.The method of claim 14 further comprising encapsulating the first dieand second die.
 16. The method of claim 1 further comprising: adding atleast one other component to the substrate; underfilling the at leastone other component; and encapsulating the at least one other component.17. A method comprising: attaching at least one die to a substrate;placing a thermally conductive heat spreader over the die, the thermallyconductive heat spreader surrounding the die; and interposing a moltenmetal material between the thermally conductive heat spreader and thedie, the molten metal material substantially filling a gap between thedie and the thermally conductive heat spreader.
 18. The method of claim17 further comprising attaching a second die onto the substrate.
 19. Themethod of claim 17 further comprising stacking a second die onto the atleast one die attached to the substrate.
 20. The method of claim 17further comprising underfilling the space between the die and thesubstrate.
 21. The method of claim 17 wherein interposing a molten metalmaterial further comprises removing the molten metal material from aportion of a vessel that is not exposed to the atmosphere.
 22. Themethod of claim 17 further comprising adding a wetting layer to at leastone surface in the space between the die and the substrate.
 23. A methodcomprising: attaching at least one die to a substrate; placing athermally conductive heat spreader over the die; interposing a moltenmetal material between the thermally conductive heat spreader and thedie, the molten metal material substantially filling a gap between thedie and the thermally conductive heat spreader; and cooling the moltenmetal material after the space between the at least one die and thethermally conductive heat spreader was filled with the molten metalmaterial.
 24. The method of claim 23 further comprising pressurizing themolten metal material.
 25. A method comprising: attaching a die to asubstrate; placing a heat spreader into a mold; placing the substrateand die into the mold; and flowing a molten metal material into contactwith the heat spreader and the die to substantially fill a gap betweenthe heat spreader and the die.
 26. The 1method of claim 25 furthercomprising underfilling the space between the die and the substrate. 27.The method of claim 25 further comprising encapsulating the die.
 28. Themethod of claim 25 wherein flowing a molten metal material into contactwith the heat spreader and the die includes flowing a molten metalmaterial through a gate in the mold and a gate in the heat spreader. 29.The method of claim 25 further comprising cooling the mold and thethermally conductive heat spreader to solidify the molten metalmaterial.
 30. The method of claim 25 wherein flowing a molten metalmaterial into contact with the heat spreader and the die includesfilling the space between the heat spreader and the die.
 31. The methodof claim 25 further comprising covering an electrical contact betweenthe die and the substrate.
 32. The method of claim 25 further comprisingcovering a plurality of electrical contacts between the die and thesubstrate with a material that is stable in the presence of the moltenmetal.
 33. The method of claim 25 further comprising placing a pressureon the molten metal material.
 34. The method of claim 25 furthercomprising encapsulating the die with a material that is stable in thepresence of the molten metal.
 35. The method of claim 25 furthercomprising adding an other component.
 36. The method of claim 35 furthercomprising providing an underfiller between the other component and asurface to which the another component is attached.
 37. The method ofclaim 35 further comprising encapsulating the die and the othercomponent.
 38. The method of claim 35 further comprising: isolating aplurality of electrical contacts between the die and the substrate towhich the die is attached from the molten metal; and isolating aplurality of electrical contacts between the other component and asurface to which the other component is attached from the molten metal.39. The method of claim 35 wherein adding an other component includesattaching the other component to the die.
 40. The method of claim 35wherein adding an other component includes attaching the other componentto the substrate.
 41. A method comprising: attaching a die to asubstrate; heating a mold; placing a thermally conductive heat spreaderinto the mold; placing the substrate into the mold; and flowing a moltenmetal material into contact with the thermally conductive heat spreaderand the die, wherein flowing a molten metal material into contact withthe thermally conductive heat spreader and the die includes flowing amolten metal material through a gate in the mold and a gate in thethermally conductive heat spreader.
 42. A method comprising: attaching adie to a substrate; placing a heat spreader into a mold; placing thesubstrate and die into the mold; and flowing a molten metal materialinto contact with the heat spreader and the die, wherein flowing amolten metal material into contact with the heat spreader and the dieincludes flowing a molten metal material through a gate in the mold anda gate in the heat spreader.